Abstract. Laser induced reactions in SiH₄/CF₂CFCl mixtures under total pressure 0.92-2.5 kPa are initiated by a TEA CO₂ laser at two w avelengths (944.19 cm^-1 and 1055.63 cm^-1). The final products have a fluorine atom attached to silicon and a hydrogen atom to carbon, and they are - ethyne, tetrafluorosilane and trifluorosilane. Under these working conditions, a common collisional reaction channel between energized SiH₄ and CF₂CFCl molecules is initiated.

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