Bulg. J. Phys. vol.23 no.1-2 (1996), pp. 058-062


Laser Optogalvanic Analysis of Thin Film Tidckness in Hollow Cathode Discharge

V. Mihailov, R. Djulgerova
G. Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria
Abstract. In this experimental investigation comparative evaluation is made of the hollow cathode glow discharge possibilities for layer and surface analysis, in particular, for thin film thickness measurement by three approaches based on classical direct layer-by-layer spectral analysis, conventional optogalvanic effect and photoelectric optogalvanic effect.

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