Abstract. In the present work the plasma surface modification of the polyethylene terephthalate is researched. It is realized in the RF-capacitive discharge. The modification in the flowing regime of the discharge is carried out for the following gas mixtures Ar-O₂, CF₄-O₂ and CF₂Cl₂-O₂. The time of treatment of the discharge t_tr is changed in the ranges 0,1-100 s. The experimental results for the wetting contact angle θ and adhesion work W_a are obtained as a function of the time t_tr at a different percentage of the gas mixture. Several fields with defined character times are seen in dependence on the rate of change in the angle θ and the work W_a, which describes participation of several chemical kinetic processes. The qualitative analysis of the experimental results is made using different by their chemical compound functional groups, which are created and destroyed on the polymer surface at the time of treatment of the pattern in the discharge. The behavior and analysis of the experimental results in the presence of residual oxygen-containing gases shows that treating of the polymer material in pure gases should be interpreted with the same kinetic schemes as well as their mixtures with oxygen.

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