Abstract. An original automated setup based on a modular principle for semiconductor deep level characterization by the photoconductivity method and its advanced modifications is presented. The standard interface IEEE-488 is utilized for a setup control. The setup includes two basic modules. The first one consists of measuring equipment provided with IEEE-488 interface factory; The second one is an original microprocessor system constructed by the authors, which allows complex and flexible characterization of the semiconductor deep levels. Further, it enables us to meet the newly emerged requirements imposed by advanced measurement methods The software guaranties reliability of both the experiment and measurement data, the fast operation and the possibility for real time measurements.

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