Bulg. J. Phys. vol.24 no.3-4 (1997), pp. 156-162



GaAs/AlxGa1-xAs Heterointerface Properties Assessment by Means of Capacitive Measurements

E.P. Valcheva
Department of Solid State Physics and Microelectronics, University of Sofia, 5 J. Bourchier Blvd, 1164 Sofia, Bulgaria
Abstract. Heterojunction composition profile is calculated by means of computer simulation of capacitance-voltage analysis of liquid-phase epitaxy grown AlxGa1-xAs/GaAs N-n heterojunctions. Considered is one case often met in practice — the existence of donor type interface states with high concentration, distributed in a box 150 Å wide at the heterointerface and energy level position ascribed to ASGa, antisite related defect.

Full-text: PDF

go back